GB/T 33140-2016
ActivePhosphorized copper anode used for integrated circuit
集成电路用磷铜阳极
Application Summary AI generated
GB/T 33140-2016 specifies the technical requirements, test methods, inspection rules, and packaging for phosphorized copper anodes used in the electroplating process of integrated circuit manufacturing. It is applied in the semiconductor industry to ensure the purity, phosphorus content uniformity, and dimensional precision of copper anodes, which are critical for achieving defect-free copper interconnects in advanced IC packaging and wafer-level metallization. The standard is used by copper anode producers and IC fabrication facilities to control material quality and process consistency.
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